A Novel Approach for Distributed Monitoring of Volatile Organic Contamination in Cleanrooms

Volatile Organic Compounds (VOC) compromise production quality, reduce process yield and even threaten occupational safety in cleanrooms. Yet, VOC monitoring in cleanrooms is done only at fixed intervals (once per week or even less frequently) by bulky, expensive and tedious instruments. As a result, critical VOC levels may not be detected at all or cannot be correlated to respective timelines. Thus, there is an emerging need for advanced molecular sensors in the modern space sector. This project aims to explore a novel method to monitor continuously critical VOC in cleanroom air with distributed sensor networks. The key advantage of this approach: Contamination is now recognized immediately and can be correlated directly to events that compromise cleanroom operation. This project has become feasible due to recent breakthroughs in nanotechnology that enable us the design of selective chemoresistive sensors to quantify VOC even lowest parts-per-billion concentrations. By utilizing flame aerosol technology, we will explore sensing and filter materials. As an early proof-of-concept, we will integrate these sensors as arrays into compact prototypes to demonstrate the accurate monitoring of VOC in an in-house cleanroom that can be expanded to ESA contractors (e.g., Beyond Gravity or Thales Alenia Space with ISO 8 and ISO 5). The resulting VOC sensors will complement existing particulate matter sensors (ECSS-Q-ST-70-50C) and surface molecular contamination control (MOC, ECSS-Q-ST-70-01C and ECSS-Q-ST-70-05C). Besides cleanrooms, the developed technology has also other applications as reliable and continuous detection of VOC is relevant for air quality monitoring in manned space missions/space stations, submarines, car cabines, renovated buildings and at workplaces in industry as well, just to name few.